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tool_throughput_gain [2021/04/03 11:36] wikiadmin |
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==== Canon Steppers ==== | ==== Canon Steppers ==== | ||
- | At ErgoTech we're experts | + | At ErgoTech we' |
- | There's a lot to manage in these tools. Recipes are not simple, which is why we' | + | We've worked with all kinds of photo tools, |
- | In addition to the recipe you need tool-specific parameters. | + | There' |
+ | |||
+ | In addition to the jobfile or recipe you need tool-specific parameters | ||
Reticle management, automated reticle entry and tracking, as well as ensuring that the correct reticle file is on the tool, alone is more complex than most tool automation. | Reticle management, automated reticle entry and tracking, as well as ensuring that the correct reticle file is on the tool, alone is more complex than most tool automation. | ||
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Then, finally managing wafer processing and the idiosyncrasies of these tools (why does the wafer count report wafer that weren' | Then, finally managing wafer processing and the idiosyncrasies of these tools (why does the wafer count report wafer that weren' | ||
- | It's also an open secret that there' | + | There's also a local SQL database on these tools that can provide more information and control than available through the standard automation interface. |
- | At one customer site we replaced an existing CIM system. (The existing CIM system was architected by a recently formed fab automation provider - experience really does count.) | + | At one customer site we replaced an existing CIM system. (The existing CIM system was architected by a recently formed fab automation provider - experience really does count.) |
Improvements in efficiency with this level of automation, in a very busy fab, enhanced the productivity with saving equivalent to adding an additional tool. | Improvements in efficiency with this level of automation, in a very busy fab, enhanced the productivity with saving equivalent to adding an additional tool. |