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tool_throughput_gain [2021/04/03 11:32]
wikiadmin
tool_throughput_gain [2021/04/03 11:59] (current)
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 === How one fab increased stepper throughput by 15%. === === How one fab increased stepper throughput by 15%. ===
  
-[[https://ergotech.com/contact?edit[cid]=6&edit[subject]=Semiconductor Automation"|Please contact us]] to ask how we can help you save costs and increase productivity+[[https://ergotech.com/contact?edit[cid]=6&edit[subject]=Semiconductor Automation"|Please contact us]] to ask how we can help you save costs with decreased scrap and rework and increase productivity
  
 {{ :pasted:20210403-102825.png?400|}} {{ :pasted:20210403-102825.png?400|}}
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 We've provided fab automation for all types of fab tools. It's easy to use TransSECS "characterize" the tool to give you all the GEM IDs, then just drag-and-drop connections to [[transsecs|IOT, Cloud, databases, MES, factory automation or other systems]].  Many application can be completed with that and simple in-application scripting, or you can use the [[programmatic|programming language of your choice]]. We've provided fab automation for all types of fab tools. It's easy to use TransSECS "characterize" the tool to give you all the GEM IDs, then just drag-and-drop connections to [[transsecs|IOT, Cloud, databases, MES, factory automation or other systems]].  Many application can be completed with that and simple in-application scripting, or you can use the [[programmatic|programming language of your choice]].
  
 +{{ :pasted:20210403-104129.png?400|Drag-and-Drop Reports}}
  
-{{ :pasted:20210403-103954.png?400|Easy Online Tool Characterization}}+{{:pasted:20210403-103954.png?400|Easy Online Tool Characterization }}
  
-{{:pasted:20210403-104129.png?400|Drag-and-Drop Reports }} 
  
-{{ https://ergotech.com/img/Avnet.png?50|Industrial Raspberry Pi}}You can quickly test and enhance the application within the TransSECS editor before deploying to the Cloud, Server, PC or IOT device (including the popular Raspberry Pi and industrial versions of that platform).+{{https://ergotech.com/img/Avnet.png?50|Industrial Raspberry Pi }}You can quickly test and enhance the application within the TransSECS editor before deploying to the Cloud, Server, PC or IOT device (including the popular Raspberry Pi and industrial versions of that platform).
  
 Photo tools offer a special challenge.  These tools are both critical and complex, with feedforward requirements from tracks and feedback from metrology. Photo tools offer a special challenge.  These tools are both critical and complex, with feedforward requirements from tracks and feedback from metrology.
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 ==== Canon Steppers ==== ==== Canon Steppers ====
  
-At ErgoTech we're experts on the Canon Steppers Everything from the old i4'to the new 30i5+ and 50iZ2 - the whole family of Canon tools.+At ErgoTech we're highly experienced experts in all areas of fab automationWhether you want to use our tools to build your automation, need a little help, or a whole turn-key installation we're here for you 
  
-There's a lot to manage in these tools.  Recipes are not simplewhich is why we've helped customer with automatic job generation (AJG) for the old i-lines and ARC for the more modern tools.  We also have converter software to convert the i5 binary JobFiles to the new XML-based recipe file format.  This can be performed rapidly and "on the fly".+We've worked with all kinds of photo tools, but in helping fabs, we've gained in-depth knowledge of the Canon Steppers.  Everything from the old i4'to the new 30i5+ and 50iZ2 - the whole family of Canon tools.
  
-In addition to the recipe you need tool-specific parameters.  Offsets, Scaling, Rotation, Exposures and more provided as the job starts on the tool.+There's a lot to manage on these tools.  Recipes are not simple, which is why we've helped customer with automatic job generation (AJG) for the old i-lines and ARC for the more modern tools.  Our conversion software can also convert the i5 binary JobFiles to the new XML-based recipe file format - rapidly and "on the fly"
 + 
 +In addition to the jobfile or recipe you need tool-specific parameters Offsets, Scaling, Rotation, Exposures and more provided to each tool as the job starts.
  
 Reticle management, automated reticle entry and tracking, as well as ensuring that the correct reticle file is on the tool, alone is more complex than most tool automation. Reticle management, automated reticle entry and tracking, as well as ensuring that the correct reticle file is on the tool, alone is more complex than most tool automation.
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 Then, finally managing wafer processing and the idiosyncrasies of these tools  (why does the wafer count report wafer that weren't exposed due to, for example, alignment errors)? Then, finally managing wafer processing and the idiosyncrasies of these tools  (why does the wafer count report wafer that weren't exposed due to, for example, alignment errors)?
  
-It's also an open secret that there'a local SQL database on these tools that can provide more information and control than available through the standard automation interface.+There's also a local SQL database on these tools that can provide more information and control than available through the standard automation interface.
  
-At one customer site we replaced an existing CIM system. (The existing CIM system was architected by a recently formed fab automation provider - experience really does count.)  The system was upgraded to provide full automation.  The ability to scan future lots allows jobfile download and reticle entry while processing.  Reticle entry is optimized by placing the reticle on the "preset" rather than in the library, saving considerable time at lot-start.  Lot-tracking and jobfile parameter verification (we can open the i-line jobfiles and check/change parameters) along with advanced data collection provide for process verification and so less rework.+At one customer site we replaced an existing CIM system. (The existing CIM system was architected by a recently formed fab automation provider - experience really does count.)  The system was upgraded to provide full automation.  The ability to scan future lots allows jobfile download and reticle entry while processing.  Reticle entry is optimized by placing the reticle on the "preset" rather than in the library, saving considerable time at lot-start.  Lot-tracking and jobfile parameter verification (we can "read" the binary i-line jobfiles and check/change parameters) along with advanced data collection provide for process verification and so less rework.
  
 Improvements in efficiency with this level of automation, in a very busy fab, enhanced the productivity with saving equivalent to adding an additional tool. Improvements in efficiency with this level of automation, in a very busy fab, enhanced the productivity with saving equivalent to adding an additional tool.
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