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 See how one fab improved throughput 15% on a critical toolset
-[[Tool Retrofit]
+[[Tool Retrofit]]
 See how ErgoTech saved the $2.5M cost of a new tool
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 =====Product Support=====
+Here's a good article on SECS/GEM [[https://www.researchgate.net/publication/351845005_A_Review_on_SECSGEM_A_Machine-to-Machine_M2M_Communication_Protocol_for_Industry_40|A Review on SECS/GEM: A Machine-to-Machine (M2M) Communication Protocol for Industry 4.0]]  It gets a little technical in places but also mentions competing M2M standards.  While these are not common in Semiconductor processing (just as SECS/GEM is not used outside of Semiconductor and associated industries - Electronic assembly, Photovoltaics, LED panels, etc.) some, particularly OPC UA and many PLC protocols, are used in subfab applications.
 [[MIStudio]]